JPH0183325U - - Google Patents
Info
- Publication number
- JPH0183325U JPH0183325U JP1987178964U JP17896487U JPH0183325U JP H0183325 U JPH0183325 U JP H0183325U JP 1987178964 U JP1987178964 U JP 1987178964U JP 17896487 U JP17896487 U JP 17896487U JP H0183325 U JPH0183325 U JP H0183325U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- substrate
- laser
- cvd apparatus
- longer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001182 laser chemical vapour deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178964U JPH0183325U (en]) | 1987-11-25 | 1987-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178964U JPH0183325U (en]) | 1987-11-25 | 1987-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183325U true JPH0183325U (en]) | 1989-06-02 |
Family
ID=31470555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178964U Pending JPH0183325U (en]) | 1987-11-25 | 1987-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183325U (en]) |
-
1987
- 1987-11-25 JP JP1987178964U patent/JPH0183325U/ja active Pending